Mobile communication, the Internet of Things, smart factories, smart homes - all these developments are driven by the continuous advancement of digitalization. At the core of all these technologies is semiconductors, which, as a major component of microchips, have become an indispensable part of industry. Semiconductors, as the main component of microchips, have become an indispensable part of industry. With the development of digitalization, the requirements for semiconductors are getting higher and higher. For instance, chips need to become increasingly powerful. At the same time, in semiconductor production, it is necessary to economically master highly complex and technically demanding processes. The production process must comply with strict quality standards. Measurement accuracy, efficiency and cleanroom compatibility are not only key words here, but also indispensable elements for the production of increasingly complex and powerful chips, which drive our modern daily life forward continuously.